Alexandrov, A., Tarnavsky, G., Shpak, S., Gulidov, A., & Obrecht, M. (2001). Numerical simulation for the problem of dynamics of oxide film growth in semiconductor substrates on the basis of geometrical approach and the Deal-Grove method. Numerical Methods and Programming (Vychislitel’nye Metody I Programmirovanie), 2(2), 92–111. Retrieved from https://en.num-meth.ru/index.php/journal/article/view/22