Tarnavsky G, Shpak S, Obrecht M. Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an oxidation wave in semiconductor substrates. Num. Meth. Prog. [Internet]. 2001 Mar. 11 [cited 2025 Dec. 14];2(2):12-26. Available from: https://en.num-meth.ru/index.php/journal/article/view/17